Home
1
Products
2
VACUUM GUARD3
https://www.kogaku.com.tw/en/ KOGAKU TECHNOLOGY INC.
Products
others
  • :

     

     

     

     

     

     

     

     

     

     

     

     

Home Products Agents VACUUM GUARD VACUUM GUARD
A08

VACUUM GUARD



afd8c28dc985d814e5d26352d487b5ab.png
　
　　
Material (body/plate)： AL
Seal o-ring： Viton/PFW
Flang type： KF/MF(ISO)
Size：

V-40KF for 1.5”
V-50KF for 2”
V-80KF for 3”
V-100KF for 4”
V-160MF for 6”
Application：

VACCUM PUMP SHUT DOWN
↓
MAKE DIFFERENTIAL PRESSURE
↓
BACK STREAM OF POWDER FROM VACCUM PUMP TO CHAMBER
↓
DAMAGE TO WAFER (WAFER LOSS)
1572432