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VACUUM GUARD




Material (body/plate)：	AL
Seal o-ring：	Viton/PFW
Flang type：	KF/MF(ISO)
Size：	V-40KF for 1.5” V-50KF for 2” V-80KF for 3” V-100KF for 4” V-160MF for 6”
Application：	VACCUM PUMP SHUT DOWN ↓ MAKE DIFFERENTIAL PRESSURE ↓ BACK STREAM OF POWDER FROM VACCUM PUMP TO CHAMBER ↓ DAMAGE TO WAFER (WAFER LOSS)